Power supply control loop with multiple leveling modes

ABSTRACT

A method and apparatus for controlling a power supply. The system includes a power supply and a controller for outputting a command signal to regulate the operation of the power supply. The controller determines the command signal based on at least one error signal which is selected from a plurality of error signals based on a selection criterion.

RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.10/921,078, filed Aug. 18, 2004 now U.S. Pat. No. 7,206,210 which claimsthe benefit of U.S. Provisional Application No. 60/495,719, filed onAug. 18, 2003, the entire teachings of the which are incorporated hereinby reference.

FIELD OF THE INVENTION

The invention relates to the field of power supply control. Inparticular, the invention relates to a method and system for controllinga power supply of a plasma chamber.

BACKGROUND OF THE INVENTION

Typically, power supply applications require the power supply to operatewithin a well defined operating area bounded by various electricallimits (e.g., voltage, current, power, resistance and conductance).Power supply operation is limited to operate within an operating areaeither to protect the power supply, protect the load or for some desiredcontrol effect. Depending upon the application, the power supply may,for example, be required to provide (i.e., level on) a constant poweroutput that does not exceed a specified current limit.

Further, some power supply applications require the power supply to becapable of effectively switching between operating modes (for example,switching from providing a constant power output with current andvoltage limits to providing a constant voltage with power and currentlimits).

A need therefore exists for controlling the operation of a power supplythat allows for switching between operating modes of the power supply.

SUMMARY OF THE INVENTION

The invention, in one aspect, relates to a method for controlling theoperation of a power supply. The method involves receiving a pluralityof error signals associated with operation of a power supply anddetermining which of the error signals satisfies at least one selectioncriterion. The method also involves determining properties for acontroller based on the error signal that satisfies the at least oneselection criterion and controlling the operation of the power supplywith the controller.

In some embodiments, some or all of these steps can be repeated. In someembodiments, the method involves receiving a plurality of error signalsassociated with operation of a power supply and determining which of theerror signals satisfies a plurality of selection criterion. In someembodiments, the method involves determining properties for a controllerbased a plurality of error signals that satisfy the at least oneselection criterion.

In some embodiments, the error signals are each based on a power supplyoperating parameter selected from the group consisting of voltage,current, power, resistance and conductance. In some embodiments, themethod involves normalizing the error signals. In some embodiments,normalizing the error signals stabilizes the controller. The errorsignals can be normalized by, for example, a power supply operatingparameter (e.g., one or more of voltage, current, power, resistance andconductance). In some embodiments the controller implements a controlalgorithm (e.g., proportional plus integral plus derivative,proportional plus integral, proportional plus derivative, state space,fuzzy logic). In some embodiments, determining which of the errorsignals satisfies the selection criterion is implemented by at least oneof an analog circuit and a digital signal processor.

In some embodiments, the method involves minimizing changes in the errorsignals. In some embodiments, the minimum error signal satisfies theselection criterion. In other embodiments, the maximum error signalsatisfies the selection criterion. In some embodiments, the methodinvolves continuously monitoring the plurality of error signals todetermine which error signal satisfies the selection criterion. Themethod also can involve reducing a value of at least one operatingparameter (e.g., voltage, current, power, resistance and conductance) ofthe power supply if one of the error signals exceeds a specifiedthreshold. The method also can involve delivering power with the powersupply to a complex impedance load, for example, a power converter or aplasma chamber. The power supply can be, for example, a DC power supply,an RF power supply or a microwave power supply.

In another aspect, the invention relates to a method for controlling theoperation of a power supply which involves determining a first errorsignal associated with operation of a power supply by comparing ameasured value of a first electrical parameter with a specified value ofthe first electrical parameter and a second error signal associated withoperation of the power supply by comparing a measured value of a secondelectrical parameter with a specified value of the second electricalparameter. The method also involves identifying which of the errorsignals satisfies a selection criterion and determining properties for acontroller based on the error signal that satisfies the selectioncriterion.

In another aspect, the invention is a system that includes a powersupply and a controller for outputting a command signal to regulate theoperation of the power supply. The controller determines the commandsignal based on at least one error signal. The at least one error signalis selected from a plurality of error signals based on a selectioncriterion.

The controller can be implemented with at least one of an analog circuitand a digital signal processor. The controller can regulate at least oneoperating parameter (e.g., voltage, current, power, resistance andconductance) of the power supply. The controller can minimize changes inthe error signals. The controller can normalize the error signals. Theerror signals can be normalized with a power supply operating parameter,such as, voltage, current, power, resistance or conductance. Normalizingthe error signals can stabilize the controller. The power supply candeliver power to a complex impedance load, such as, a power converter ora plasma chamber. The power supply can be, for example, a DC powersupply, an RF power supply or a microwave power supply.

In another aspect, the invention is a system that includes a powersupply and a means for determining which of a plurality of error signalssatisfies a selection criterion. The system also includes means fordetermining properties for a controller based on the error signal thatsatisfies the selection criterion and means for controlling theoperation of the power supply with the controller.

The foregoing and other objects, aspects, features, and advantages ofthe invention will become more apparent from the following descriptionand from the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other objects, feature and advantages of theinvention, as well as the invention itself, will be more fullyunderstood from the following illustrative description, when readtogether with the accompanying drawings which are not necessarily toscale.

FIG. 1 is a block diagram of a system for controlling the operation of apower supply that embodies the invention.

FIG. 2 is a flow diagram of a method for controlling the operation of apower supply, according to an illustrative embodiment of the invention.

FIG. 3 is a graphical representation of a power supply operating area,using a system for controlling the power supply according to theinvention.

FIG. 4 is a block diagram of a system for controlling the operation of apower supply employing analog circuitry, according to an illustrativeembodiment of the invention.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

FIG. 1 depicts a system 100 for use in controlling the operation of anapparatus, such as a power supply 104. The power supply 104 outputs anelectrical signal, such as power supply output 112 to an electrical load108. The load 108 is, for example, a complex impedance load such as apower converter or a plasma chamber. By way of further example, thepower supply may be a DC power supply, an RF power supply or a microwavepower supply. In some embodiments, the power supply 104 provides theoutput 112 to a plasma chamber used in a semiconductor sputteringprocess.

The system 100 also includes a controller 116 that implements a controlalgorithm. The controller 116 receives an error signal 122. Thecontroller 116 calculates and outputs a control signal 120 based on theerror signal 122 to control, in a desired manner, the operation of thepower supply 104. Any one of a variety of control algorithms may beimplemented by the controller 116, including but not limited to aproportional plus derivative plus integral control algorithm, aproportional plus derivative algorithm, a proportional plus integralalgorithm, a state space control algorithm and a fuzzy logic algorithm.In this embodiment, the controller 116 includes digital circuitry, suchas a digital signal processor. In some embodiments, the controller 116receives one or more error signals and calculates and outputs one ormore output signals based on the plurality of error signals.

By way of example, the controller 116 may include a Motorola DSP56300digital signal processor (Motorola, Schaumberg, Ill.). In someembodiments, the controller 116 and other components of the system 100may be implemented with analog circuitry or a combination of analog anddigital circuitry.

In this embodiment, the system 100 includes a set of limits, powersetpoint 124, a voltage setpoint 128, a current setpoint 132 and aconductance setpoint 136 which are operating parameters of the powersupply 104. The setpoints 124, 128, 132 and 136 are specified limits foreach of the operating parameters (power, voltage, current andconductance, respectively). The setpoint values are predefined, maximumvalues that define an operating area which the power supply 104 operateswithin to ensure that the power supply 104 and the load 108 areelectrically protected. In some embodiments, the setpoints 124, 128, 132and 136 may be modified by an operator or separate controller, forexample, during operation of the system 100.

The system 100 also includes a module 156 that receives as inputs aplurality of error signals 140, 144, 148 and 152 that are associatedwith operation of the power supply 104. The module 156 selects at leastone of the error signals 140, 144, 148 and 152 based on one or moreselection criterion and outputs a selected error signal 122 to thecontroller 116. The controller 116 determines properties for the controlalgorithm based on the at least one selected error signal 122. Thecontroller then outputs the control signal 120 to control, in a desiredmanner, the operation of the power supply 104.

In this embodiment, the module 156 employs a selection criterion thatselects the error signal which has the minimum value. A negative errorsignal is less than a positive error signal. The selected error signalis output to the controller 116 as described previously herein.Alternative and/or multiple selection criteria can be employed. Forexample, the module 156 can employ a selection criterion that selectsthe error signal which has the maximum value. In some embodiments, themodule 156 can employ a selection criterion that selects the errorsignal 122 which satisfies a mathematical equation.

In this embodiment, the error signals 140, 144, 148 and 152 are eachnormalized by appropriate scaling factors such that the error signalseach have the same units of measure as an electrical power signal (e.g.,watts). As a result, the loop gain for each error signal isapproximately equal because each error signal is normalized to have thesame units of measure. In this manner, the performance of the controlleris stabilized such that, for example, the performance of the system 100will not vary greatly when switching between operating modes of thesystem 100. For example, the performance of the system 100 will not varygreatly when the power supply changes from leveling on a maximum powervalue that is limited by maximum voltage, current and conductancesetpoint values to leveling on a maximum voltage value that is limitedby maximum power, current and conductance setpoint values.Alternatively, the error signals 140, 144, 148 and 152 can be normalizedby an arbitrary parameter such that the error signals have the sameunits of measure. In some embodiments, the error signals 140, 144, 148and 152 need not be normalized to achieve satisfactory performance.

Error signal 140 is the difference in magnitude between the powersetpoint 124 and a power sense signal 158. The power sense signal 158 isthe mathematical product of a voltage signal 160 and a current signal162. The product of the voltage signal 160 and the current signal 162has units of power (Power=Voltage*Current). A voltage sensing module 164measures and outputs a signal 170 corresponding to the voltage of thepower supply output 112. In this embodiment, a module 172 compares thevoltage signal 168 with a specified minimum voltage (Min_V). The greaterof the voltage signal 168 and the minimum voltage (Min_V) is output bythe module 172 as voltage signal 160. To ensure the controller 116 isstable minimum voltage (Min_V) is specified to be greater than zero.

Similarly, a current sensing module 166 measures the current of thepower supply output 112 and outputs a current signal 170. A module 174compares the current signal 170 with a specified minimum current(Min_I). The greater of the current signal 170 and the minimum current(Min_I) is output by the module 174 as current signal 162. To ensure thecontroller 116 is stable, minimum current (Min_I) is specified to begreater than zero.

Error signal 144 is the mathematical product of voltage signal 176 andcurrent signal 162. The mathematical product of the voltage signal 176and the current signal 162 has units of power (Power=Voltage*Current).Voltage signal 176 is the difference between the value of the voltagesetpoint 128 and the voltage signal 160.

Error signal 148 is the mathematical product of current signal 178 andvoltage signal 160. The mathematical product of the current signal 178and the voltage signal 160 has units of power (Power=Current*Voltage).Current signal 178 is the difference between the value of the currentsetpoint 132 and the current signal 162.

Error signal 152 is the mathematical product of current signal 182 andvoltage signal 160. The mathematical product of the current signal 182and the voltage signal 160 has units of power (Power=Current*Voltage).Current signal 182 is the difference between current signal 180 andcurrent signal 162. Current signal 180 is the mathematical product ofthe conductance setpoint 136 and the voltage signal 160. Conductance isequal to (1/Resistance) and has units of Mhos.

Typically, the system 100 continuously monitors the plurality of errorsignals to determine which error signal satisfies the selectioncriterion. The system 100 can repeat each step of the method of theinvention to continuously ensure desirable operation of the power supply104 and ensure the controller 116 is stable even as the operating modeof the system is changed. By way of example, each step of the method canbe repeated to ensure proper operation of the power supply 104 andcontroller 116 stability when the operating mode of the system 100 isswitched from commanding a specified power output limited by current,voltage and conductance setpoints to commanding a specified voltageoutput limited by power, current and conductance setpoints.

FIG. 2 depicts a method for controlling a power supply according to anillustrative embodiment of the invention. The method 200 may beimplemented by a power supply control system, such as the system 100 ofFIG. 1. The method 200 may be repeated (step 224) or terminated (step228) by an operator or automatically as dictated by the controller 116.Each repetition of the method 200 is defined as an iteration of themethod. In the illustrative method of FIG. 2, four error signals aremeasured (step 204): V_PWR_Limit, I_PWR_Limit, P_Error and G_PWR_Limit.By way of example, the error signals can be error signals 144, 148, 140and 152, respectively, of FIG. 1.

The minimum error signal is selected (step 208) of the four errorsignals (V_PWR_Limit, I_PWR_Limit, P_Error and G_PWR_Limit). In thisembodiment, the selection criterion selects the minimum error signal;however, alternative selection criterion may be used in otherembodiments.

In step 212, Error_N is assigned a value equal to the minimum errorsignal selected in step 208. Values for the parameters of a controlalgorithm in the controller (such as the controller 116 of FIG. 1) arecalculated (step 216) by the following equations:Derivative=DTerm*[Error_(—) N−Error_(—) N3+(Error_(—) N1−Error_(—)N2)]  EQN. 1Integral=ITerm*Error_(—) N+Integral_(—) N1  EQN. 2Proportional=PTerm*Error_(—) N  EQN. 3where DTerm, ITerm and PTerm are controller constants for a Proportionalplus Integral plus Derivative (PID) control algorithm determined, forexample, prior to starting operation of the power supply 104 andcontroller 116. Error_N1 is equal to the error signal Error_N from theimmediate prior iteration of the method 200. Error_N2 is equal to theerror signal Error_N1 from the immediate prior iteration of the method200. Error_N3 is equal to the error signal Error_N2 from the immediateprior iteration of the method 200. At startup of the system, the errorsError_N1, Error_N2 and Error_N3 are zero because step 208 has not yetselected an error (step 208). In other embodiments, an operator may, forexample, specify an initial value for some or all of the errors(Error_N1, Error_N2 and Error_N3). Integral_N1 is equal to the value ofIntegral from the immediate prior iteration of the method 200. Atstartup of the system, the value of Integral is zero because step 216has not yet determined a value (step 216). In other embodiments, anoperator may, for example, specify an initial value for Integral.

A drive signal, such as the output signal 112 of FIG. 1 is calculated(step 216) with the following equation:Drive=Proportional+Integral+Derivative  EQN. 4.The output signal 112 is then delivered to the power supply 104 tocontrol in a desired manner the operation of the power supply 104.Error_N3 is then assigned (incremented) a value equal to Error_N2;Error_N2 is assigned a value equal to Error_N1; and Error_N1 is assigneda value equal to Error_N (step 220). Each step (steps 204, 208, 212, 216and 220) is then repeated (step 224) or terminated (step 228). In someembodiments, different controller constants DTerm, ITerm and PTerm maybe implemented by the controller based on, for example, which errorsignal is selected as the minimum during a specific iteration of themethod 200.

By way of illustration, an operating area 302 for a power supply of anembodiment of the invention is illustrated in graphical representation300 of FIG. 3. In accordance with the invention, a system, such as thesystem 100 of FIG. 1, regulates the operation of a power supply andspecifies setpoints (operating limits 304, 308, 312 and 316) for thepower supply operating parameters (power, voltage, current andconductance, respectively). Limit 304 limits the output of the powersupply to a maximum power equal to 12,500 watts. Limit 308 limits theoutput of the power supply to a maximum voltage equal to 800 volts.Limit 312 limits the output of the power supply to a maximum currentequal to 25 amps. Limit 316 limits the output of the power supply to amaximum conductance equal to 0.1 Mhos (also referred to as siemens). Inthis embodiment, the power supply would operate along the perimeter ofthe operating area 302 (defined by the limits 304, 308, 312 and 316). Inother embodiments, a user can set a new operating area and effectivelychange the perimeter along which the power supply operates. For example,a user can set a new operating area that is within the originaloperating area by changing one or more of the limits 304, 308, 312 and316.

As described previously herein, the minimum error signal 122 of thesystem 100 of FIG. 1 is received by the controller 116. The controller116 calculates an output signal 120 that is suitable for controlling theoutput of the power supply 104. In this manner, the minimum error signal122 is used to regulate the operation of the power supply 104. By way offurther example, if the voltage error signal 144 is determined to be theminimum error signal 122, the power supply 104 is operating at alocation in the operating area 302 close to the operating limit 308. Ifinstead, the current error signal 148 is determined to be the minimumerror signal 122, the power supply 104 is operating at a location in theoperating area 302 close to the operating limit 312. In this manner, asthe power supply 104 operating location (i.e., dictated by the specificvalues of power, voltage, current and conductance) changes due to, forexample, a change in the electrical properties of the load 108, thesystem will select the error signal that has the minimum value.

In another embodiment, illustrated in FIG. 4, a system 400 forcontrolling the operation of the power supply 104 includes analogcircuitry for generating the power error signal 140, the voltage errorsignal 144 and the current error signal 148. Op-amp circuit 408 agenerates power error signal 140 based on power setpoint 124 and powersignal 158. Power signal 158 is the mathematical product of currentsignal 162 and voltage signal 160, similarly as previously describedherein. Op-amp circuit 408 b generates current error signal 148 based oncurrent setpoint 132 and current signal 162. Op-amp circuit 408 cgenerates voltage error signal 144 based on voltage setpoint 128 andpower signal 160.

In this embodiment, error signals 144 and 148 are not normalized to haveunits of measure equal to the units of measure of power error signal 140(e.g., watts). Accordingly, the loop gains of the op-amp circuits areindividually adjusted to ensure that the controller 116 is stable duringoperation of the system 400. In some embodiments, in the absence ofnormalizing the voltage error signal 144 and the current error signal148, the controller 116 coefficients (for example, the coefficientsDTerm, ITerm and PTerm of a PID controller) are different depending uponwhich error signal is provided to the controller 116.

Diodes 404 a, 404 b and 404 c are configured such that the minimum errorsignal (i.e., minimum of errors 140, 144 and 148) is selected andprovided to the controller 116. Controller 116 then implements, forexample, a PID controller based on the minimum error signal, asdescribed previously herein. Controller 116 then outputs a signal 120 tothe power supply 104 which then delivers a power supply output signal112 to a load, such as a complex impedance load.

By way of illustration, for a load 108 of 1 ohm, with a power supplyoutput 112 of 1 amp at 1 volt, the power output equals 1 watt. WithPOWER Setpoint equal to 100 W and I_Sense*V_Sense equal to 1 W, the U1op-amp positive input will dominate, driving the output of U1 (errorsignal 140) to the positive rail. With a power supply output 112 of 1volt and VOLTAGE Setpoint equal to 5 volts, the U3 op-amp positive inputwill dominate, driving the output of U3 (error signal 144) to thepositive rail. With a power supply output 112 of 1 amp and CURRENTSetpoint equal to 1 A, the U2 op-amp positive and negative inputs willbe equal and the output of the op-amp (error signal 148) will be onediode drop (diode D2) below zero. That results in zero volts at signal122. Because the minimum error signal is error signal 148, diode D2 (404b) is the only diode that is forward biased, hence the current error 148will be provided to the controller 116.

Variations, modifications, and other implementations of what isdescribed herein will occur to those of ordinary skill in the artwithout departing from the spirit and the scope of the invention asclaimed. Accordingly, the invention is to be defined not by thepreceding illustrative description but instead by the spirit and scopeof the following claims.

1. A method for controlling the operation of a power supply, the methodcomprising: (a) receiving a plurality of error signals associated withoperation of a power supply; (b) determining which of the error signalssatisfies at least one selection criterion; (c) determining propertiesfor a controller based on the error signal that satisfies the at leastone selection criterion, wherein the properties are determined by usinga control algorithm selected from a group of control methods comprisingstate space and fuzzy logic; and (d) controlling the operation of thepower supply with the controller.
 2. The method of claim 1, comprisingthe step of (e) repeating steps (a), (b), (c) and (d).
 3. The method ofclaim 1, wherein the error signals are each based on a power supplyoperating parameter selected from the group consisting of voltage,current, power, resistance and conductance.
 4. The method of claim 1,comprising normalizing the error signals.
 5. The method of claim 4,wherein the error signals are normalized by a power supply operatingparameter.
 6. The method of claim 5, wherein the power supply operatingparameter is selected from the group consisting of voltage, current,power, resistance and conductance.
 7. The method of claim 4, wherein theerror signals are normalized to stabilize the controller.
 8. The methodof claim 1, wherein the minimum error signal satisfies the selectioncriterion.
 9. The method of claim 1, wherein the maximum error signalsatisfies the selection criterion.
 10. The method of claim 1, whereindetermining which of the error signals satisfies the selection criterionis implemented by at least one of an analog circuit and a digital signalprocessor.
 11. The method of claim 1, comprising continuously monitoringthe plurality of error signals to determine which error signal satisfiesthe selection criterion.
 12. The method of claim 1, comprising reducinga value of at least one operating parameter of the power supply if oneof the error signals exceeds a specified threshold.
 13. The method ofclaim 12, wherein the operating parameter is selected from the groupconsisting of voltage, current, power, resistance and conductance. 14.The method of claim 1, comprising delivering power with the power supplyto a complex impedance load.
 15. The method of claim 14, wherein thecomplex impedance load is a power converter.
 16. The method of claim 1,wherein the complex impedance load is a plasma chamber.
 17. The methodof claim 1, wherein the power supply is selected from the groupconsisting of a DC power supply, RF power supply and microwave supply.18. A method for controlling the operation of a power supply, the methodcomprising: (a) determining a first error signal associated withoperation of a power supply by comparing a measured value of a firstelectrical parameter with a specified value of the first electricalparameter; (b) determining a second error signal associated withoperation of the power supply by comparing a measured value of a secondelectrical parameter with a specified value of the second electricalparameter; (c) identifying which of the error signals satisfies aselection criterion; and (d) determining properties for a controllerbased on the error signal that satisfies the selection criterion wherethe properties are determined by using a control algorithm selected froma group of control methods comprising state space and fuzzy logic.
 19. Asystem, comprising: (a) a power supply; and (b) a controller foroutputting a command signal to regulate the operation of the powersupply, the controller determining the command signal on the basis of(1) at least one error signal selected from a plurality of error signalsbased on a selection criterion; and (2) a control algorithm selectedfrom a group of control methods comprising state space and fuzzy logic.20. A system, comprising: (a) a power supply; (b) means for determiningwhich of a plurality of error signals satisfies a selection criterion;(c) means for determining properties for a controller based on (1) theerror signal that satisfies the selection criterion and (2) a controlalgorithm selected from a group of control methods comprising statespace and fuzzy logic; and (d) means for controlling the operation ofthe power supply with the controller.